Deliver high-volume throughput and rapid venting to atmosphere, allowing the load lock and/or transfer chamger to fill at a higher rate without particle disturbance or excessive turbulance.

• Patented, sintered nickel technology provides superior performance in all applications
• Design enables removal of particles from incoming gas greater than 0.0015 µm, minimizing wafer defects
• Patented, sintered nickel technology in a compact diffuser
• Easy installation/retrofit into existing tools with minimizes downtime

Chambergard™ BGN Fast Vent Diffusers Applications

• Bulk Gas Delivery
• Deposition
• Dry Etch
• Ion Implant
• Photolithography