features & benefits

• Processes two sizes of substrates: 150/200, 200/300, or 300/450mm
• The sapphire resonator is particle neutral and will not add particles to the process
• Patented crystal bond to the resonator
• Patented RF connection to the crystal
• Redundant internal RTD temperature monitoring
• Custom sizes available
• Sapphire resonator compatible with all processing chemistries
• Uniform direct acoustic energy applied to the process
• Increased process efficiency
• Reduced process time
• Reduced process chemistry usage
• No moving parts to maintain
• No consumables – works better than brushes