GateKeeper® HX Series Gas Purification Systems

GateKeeper® HX Series - Gases Purified: Hydrogen (H2), Nitrogen (N2) or Argon (Ar). Continuous flow, point-of-use purified hydrogen, nitrogen or argon gas at a low cost of ownership.

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  Removes contaminants such as H2O, O2 and more
• Ensures cleaner process in parts-per-million levels
• Power failures will not harm the system
• Purifiers automatically self-regenerate
• Uses minimal fab floor space to save costs 

GateKeeper^® HX Series Gas Purification Systems Applications

• Bulk Gas
• Epitaxy