These point-of-use, in-line gas purifiers effectively removes hydrocarbons, acid and base impurities, and particles in lithography applications.

• Removes impurities in CDA, N₂, Ar, and He gases
• Excellent initial cleanliness
• Effectively removes particles in gas stream
• Can be used without power
• Various models for various flow rate

Luminousgard™ Gas Purifiers Applications

• Clean dry air (CDA)
• Lens purge gas line for exposure equipment
• Purge gas line for laser generator
• Inert gas supply line