This family of auto regenerable PS31, PS32, and PS33 bulk, carbon dioxide gas purifiers efficiently removes numerous impurities with high reliability, low cost, and high performance.

• Uses an adsorption process designed specifically to provide ultra-high purity gas for semiconductor applications
• Dual adsorber vessels alternate between purify and regeneration modes, providing continuous purification
• Adsorber regeneration is accomplished by back flushing with nitrogen (N₂), hydrogen (H₂), or process gas at elevated temperatures
• The Model PS33 also includes a heated catalyst vessel that converts total hydrocarbons (THC), H₂, and carbon monoxide (CO) into carbon dioxide (CO₂) and water (H₂O)
• Optimized designs provide sub-ppb performance in small footprints with flow rates of 0-8,333 slpm (500 Nm³/hr)
• Available in PS31, PS32, and PS33 configurations to remove specific gases for your application

MegaTorr^® PS31, PS32, PS33 Carbon Dioxide Gas Purifiers Applications

• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar