MegaTorr® PS7-A Hydrogen Gas Purifiers
These PS7-A auto regenerable bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.
- Uses adsorption processes to provide ultra-high purity hydrogen (H2) gas for semiconductor applications
- Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
- Adsorber regeneration is accomplished by back flushing with purified H2 at an elevated temperature
- Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm3/hr)
- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
Specifications
Dimensions
| Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
| PS7-MGS10-A - PS7-MGS40-A | 138 | 80 | 40 | <110 |
| PS7-MGS50-A - PS7-MGS60-A | 168 | 87 | 61 | <180 |
| PS7-MGS90-A - PS7-MGS120-A | 199 | 92 | 69 | <300 |
| PS7-MGT200-A | 208 | 130 | 163 | <1,361 |
สนใจเกี่ยวกับผลิตภัณฑ์หรือบริการของเรา?
