Reliably remove particles from inert gases with flow rates up to 30 slpm.

• Provide efficient, low-cost, point-of-use filtration of inert gases
• > 99.9999999% removal of all particles greater than 0.015 µm diameter

Wafergard® GT-Plus In-line Gas Filters Applications

• Low air intake filter
• Wafer transport systems
• Clean dry air (CDA)