Durable, stainless steel filters designed for ultra-high purity (UHP), high-flow gas lines with mid-range flow rates up to 500 slpm such as diffusion, annealing, and epitaxy tools.

• Optimized high-flow and high-retention 316L stainless steel filter element enables 3x flow rate and 3-digit retention efficiency improvement over existing model
• Standard size allows easy installation into existing gas panels or delivery systems without design changes
• All 316L stainless steel construction provides durable, long-lasting performance, excellent gas compatibility with most semiconductor gases, and reliability in high-temperature and dynamic pressure applications

Wafergard® II 3XP In-line Gas Filters Applications

• Ultra-high purity (UHP), high flow gass lines
• Applications with mid-flow range rates up to 500 slpm such as diffusion, annealing, epitaxy tools