Wafergard® II SF Mini/Mini XL In-line Gas Filters
Ideal for high-purity gas systems when high particle removal efficiency is desired and all stainless steel construction is preferred.
- The all 316L stainless steel construction provides good chemical compatibility with most semiconductor process gases
- Specialized cleaning and high-temperature baking achieve superior initial cleanliness, enabling quick gas start-up
- High flow rate/low pressure drop characteristics are suitable for use with low vapor pressure gases
- High particle removal efficiency reduces on-wafer defects, increasing yield
- Available in standard and long (XL) lengths
Wafergard® II SF Mini/Mini XL In-line Gas Filters Applications
- Ultrapure gas lines
- High-temperature applications
- Dynamic-pressure applications
- Inert and reactive gases*
- Gas cabinets
- Gas panels
- Valve manifold boxes
- Hookup
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