Offer superior particulate filtration for ultrapure gas system filtration.

• All metal construction provides the cleanest, most efficient all-metal filters available
• Patented nickel filter membrane offers superior corrosion resistance and excellent chemical compatibility
• Innovative housing design helps eliminate outgassing and reduces drydown time
• Ideal for high-temperature and dynamic-pressure applications
• Typically used for flows up to 30 slpm

Wafergard® III NF-30 In-line Gas Filters Applications

• Bulk gas delivery
• Photolithography
• Deposition
• Dry etch
• Ion implantation