Wafergard® III NF Micro In-line Gas Filters

Offer superior particulate filtration of inert and reactive gases for ultrapure gas systems.

• Cleanest, most efficient all-metal filters available
• Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases*
• State-of-the-art housing assembly eliminates outgassing by minimizing weld area
• All-metal construction is ideal for high-temperature and dynamic pressure applications
• Compact size and flexible choice of fittings provide design efficiency and minimize engineering costs

*Not recommended for use with CO, O₃, and low-level hydride dopant gases.

Wafergard® III NF Micro In-line Gas Filters Applications

• Ultrapure gas lines
• High-temperature applications
• New fab construction
• Dynamic-pressure applications
• Inert and reactive gases