These in-line gas filters utilize PTFE membranes supported by PFA structures and 316L stainless steel housings, provide superior particulate filtration in ultrapure gas applications.

• Large filtration area with 3x larger filtration, low pressure drop and high flow 
• Same length dimension as current filter generation allows easy implementation without design changes of gas panel or delivery system
• Extended filter lifetime, 3x longer than earlier generation

Wafergard® MAX-1000 In-line PTFE Gas Filter Applications

• Filtration of SiCl₄, GeCL_4, and POCl₃ 
• Optical fiber application
• Silica glass application