Semiconductor Products from Brooks Instrument

Maximum precision and control to meet the demands of the world's most challenging industries.

Precise and repeatable process control is critical in electronics and semiconductor manufacturing. As tools, processes, and technology nodes advance, the demand for ultra-high performance and innovation in flow and pressure control devices continues to grow.

Brooks Instrument Semiconductor Products address these needs with the industry's most advanced flow, pressure, vacuum, and vapor delivery solutions, leveraging decades of experience in developing measurement and control instrumentation that sets the standard for industrial manufacturing processes.

Why Choose Brooks Instrument?

• Expertise: Leading semiconductor tool manufacturers trust Brooks to develop flow and pressure measurement and control technologies.
• Precision: Delivering the right level of accuracy for the application, helping to reduce tool costs and maximize yield.
• Reliability: Engineered with high-quality alloys and patented sensors, providing high accuracy and stability even with exotic gases.
• Commitment: Global service infrastructure to respond to instrument issues rapidly and support long-term operations.
• Support: Application experts available for consultation, along with customizable meter configuration services.