Dual Zone MegPie™
The Dual Zone MegPie™ is a megasonic transducer for cleaning and sonochemical processing of two substrate sizes in one chamber. It applies a radially uniform dose of acoustic energy, improves process efficiency, lowers process time, and is easy to retrofit to existing processing tools.
features & benefits
- Processes two sizes of substrates: 150/200, 200/300, or 300/450mm
- The sapphire resonator is particle neutral and will not add particles to the process
- Patented crystal bond to the resonator
- Patented RF connection to the crystal
- Redundant internal RTD temperature monitoring
- Custom sizes available
- Sapphire resonator compatible with all processing chemistries
- Uniform direct acoustic energy applied to the process
- Increased process efficiency
- Reduced process time
- Reduced process chemistry usage
- No moving parts to maintain
- No consumables – works better than brushes
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