Fluorogard AT Filter

Clean, cost-effective filtration of non-outgassing, aqueous, acid and base chemistries or advanced solvent applications in greater than 65 nm technology nodes.

Fluorogard® AT Filter Applications

• Industry: Semiconductor (wet etch and clean, bulk chemical delivery), Life Sciences (purification), Flat Panel Display (organic layer printing)
• Chemistry: Aggressive acids, aggressive bases, solvents
• Installation: Point of tool, bulk