Fluorogard RS Filter

#Filter #entegris

Point-of-tool resist stripper filter with strong flow rate and contaminant retention performance in 90 - 180 nm technology nodes. 

Fluorogard® RS Filter Applications

  • Industry: Semiconductor
  • Process: Wet Etch and Clean
  • Chemistry: Resist Stripping
  • Installation Point: Point of Tool
We'd love to hear from you
Filterfine (Thailand) Co., Ltd.


594/11 Haus the Hamburg Village, Hathairat Road, Bangchan, Klongsamwa Bangkok 10510 Thailand.

Get in Touch 


    filterfine@filterfineth.com

     0-2121-7226

    Filtration Division

Ms. Adisa

096-782-6363  

  adisa@filterfineth.com

    Metrology Division

Mr. Chayanon

096-782-4449  

  chayanon@filterfineth.com

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