GateKeeper® DX Series Gas Purification Systems

GateKeeper® DX Series – Gases Purified: Carbon Dioxide (CO2). Continuous flow, point-of-use purified CO2 gas at a low cost of ownership.

• DX series systems remove volatile acids and bases
• Ensures cleaner process in parts-per-million levels
• Power failures will not harm the system
• Purifiers automatically self-regenerate
• Uses minimal fab floor space to save costs 
• Photolithography 
• Applications that require purified CO2 gas 
• Wet etch and clean  

GateKeeper^® DX Series Gas Purification Systems Applications

• Photolithography
• Applications that require purified CO2 gas
• Wet Etch and Clean