GateKeeper® Gas Purification System (GPS) SX Series is the latest continuous service gas purification system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution.

• Purifies to part-per-billion (ppb) levels
• Low pressure resulting in no changes to inlet pressure required
• Self-regenerating purifiers
• Low cost of ownership
• Ambient temperature purification for low energy costs and resource conservation
• Power failure will not damage purification system

GateKeeper^® SX Series Gas Purification Systems Applications

• Metal Organic Chemical Vapor (MOCVD)
• Atomic Layer Deposition (ALD)
• Low Temperature Epitaxy (LTE)
• Other applications requiring ammonia gas