These PS2, PS3, PS4 heated getter gas purifiers utilizes the only purifier technology capable of removing all hydrocarbons and nitrogen from process gases.

• Point-of-use (POU) gas purification ensures consistent and repeatable process performance, isolates critical process areas from house gas distribution systems, and protects against gas purity upsets and cross contamination
• Provides the most complete removal of impurities for rare gases, nitrogen (N₂), and hydrogen (H₂), with high reliability, low cost, and high performance
• The heated getter material forms irreversible chemical bonds with any oxide, carbide, and nitride impurities
• Optimized design provides sub-ppb performance, which is better than gas from cylinder or liquid sources, in small footprints with flow rates up to 150 slpm (9 Nm³/hr)