Luminousgard™ Gas Purifiers
These point-of-use, in-line gas purifiers effectively removes hydrocarbons, acid and base impurities, and particles in lithography applications.
- Removes impurities in CDA, N2, Ar, and He gases
- Excellent initial cleanliness
- Effectively removes particles in gas stream
- Can be used without power
- Various models for various flow rate
Luminousgard™ Gas Purifiers Applications
- Clean dry air (CDA)
- Lens purge gas line for exposure equipment
- Purge gas line for laser generator
- Inert gas supply line
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