MegaTorr® PS7-CR Hydrogen Gas Purifiers

These cryogenic PS7-CR bulk hydrogen gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

• Uses an adsorption process to provide ultra-high purity hydrogen (H₂) gas for semiconductor applications
• Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
• Adsorber regeneration is accomplished by back flushing with purified H₂ at an elevated temperature
• Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)