All-in-one purifier/filter devices that deliver ultimate protection from metal contamination in critical DI water cleaning applications.

• High-efficiency purifier designed for DI water applications up to 80°C
• Superior flow rate performance and contaminant removal capabilities in all technology nodes
• Promotes fast startups and high yields at high temperatures
• High-ion exchange capability has proven particle performance and low metals extractables with fewer on-wafer particles

Protego® Plus HT and HTX Purifiers Applications

Cartridges

• Bulk DI water applications 
• Point-of tool purification

Disposables

• Point-of-use
• Lab scale