Products & Services
Elevating industrial standards with world-class innovative solutions.
Meeting every requirement for manufacturing and quality control.
Protego® Plus IPA Purifier
High-efficiency solvent purifier/filters providing superior metal and particle removal for critical gate-cleaning (FEOL) applications in sub 45 nm technology nodes.
Protego® Plus IPA Purifier Applications
- Industry: Semiconductor (Wet Clean and Clean)
- Chemistry: Solvent
- Installation Point: Point-of-Tool
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