Protego® Plus LT Purifier

#Filter #entegris

All-in-one purifier/filter devices that deliver ultimate protection from metal contamination in critical DI water cleaning applications.

  • High-efficiency purifier designed for DI water applications up to 60°C
  • Superior flow rate performance and contaminant removal capabilities in all technology nodes
  • Promotes fast startups and high yields at low temperatures
  • High-ion exchange capability has proven particle performance and low metals extractables with fewer on-wafer particles

Protego® Plus LT Purifier Applications

Cartridges

  • Bulk DI water applications 
  • Point-of tool purification

Disposables

  • Point-of-use
  • Lab scale
We'd love to hear from you
Filterfine (Thailand) Co., Ltd.


594/11 Haus the Hamburg Village, Hathairat Road, Bangchan, Klongsamwa Bangkok 10510 Thailand.

Get in Touch 


    filterfine@filterfineth.com

     0-2121-7226

    Filtration Division

Ms. Adisa

096-782-6363  

  adisa@filterfineth.com

    Metrology Division

Mr. Chayanon

096-782-4449  

  chayanon@filterfineth.com

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