Point-of-tool, DI water filter with high flow-rate-performance and good contaminant retention capabilities in greater than 180 nm technology nodes.  

Savana® PS Plus Filters Applications

• Industry: Life Sciences, Flat Panel Display, Data Storage, Chemical Manufacturing
• Process: Purificaiton, Facilities, HDD Assembly - Cleaning, Substrate Cleaning, Magnetic Head - Wet Etch and Clean, HGA/HSA Assembly - Cleaning, Chemical, Cleaning, Rework
• Chemistry: Dilute Acids, Dilute Bases, DI Water
• Installation Point: Point of Tool, Bulk