Wafergard® II F Micro In-line Gas Filters

Recommended for inert and reactive gases, these gas filters offer excellent compatibility with all classes of semiconductor process gases and easy installation in cramped gas panels and cabinets. 

• PTFE membranes provide high-efficiency filtration
• Low pressure-drop reduces the risk of condensation in lower vapor pressure gases
• Excellent compatibility with all classes of semiconductor process gases
• For use with inert and reactive gases, including ozone