Superior particulate filtration in gas panels, gas cabinets, and anywhere ultrapure gas is required for wafer processing.

• Compact unit reduces overall gas box footprint, saving valuable equipment space
• PTFE membranes provide high-efficiency filtration, improving product yield
• Low pressure drop reduces the risk of condensation in low vapor pressure gases
• Excellent compatibility with all classes of semiconductor process gases
• For use with inert and reactive gases, including ozone

Wafergard® II F Mini XL In-line Gas Filters Applications

• Ozone applications (gas)
• Gas cabinets
• Ultrapure gas systems
• Valve manifold boxes
• Gas panels