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Wafergard® II SF Half In-line Gas Filters

#Filter #entegris #Gas Filter

Wafergard® II SF Half In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.  

  • State-of-the-art housing assembly eliminated outgassing by minimizing weld area.  
  • The all-metal construction is ideal for high temperature and dynamic pressure applications.
  • Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.

Wafergard® II SF Half In-line Gas Filters Applications

  • Bulk Gas Delivery
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
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