Wafergard® II SF Half In-line Gas Filters

Wafergard® II SF Half In-line gas filters are the filters of choice for high purity gas systems when all stainless steel constructions is preferred.  

• State-of-the-art housing assembly eliminated outgassing by minimizing weld area.  
• The all-metal construction is ideal for high temperature and dynamic pressure applications.
• Its compact size and flexible choice of fittings provides ultimate design efficiency and minimizes engineering costs.

Wafergard® II SF Half In-line Gas Filters Applications

• Bulk Gas Delivery
• Photolithography
• Deposition
• Dry Etch
• Ion Implantation