These nickel membrane filters are the cleanest, most efficient all-metal filters available for ultrapure gas system filtration.

• The nickel membrane offers superior corrosion resistance and excellent compatibility in inert and reactive gas applications with flows up to 100 slpm
• The clean, all-metal construction is ideal for high-temperature and dynamic-pressure applications 
• Provides excellent chemical compatibility and can be used with a wide range of chemistries
• State-of-the-art housing assembly eliminates outgassing, reduces drydown times, and does not contribute contamination

Wafergard® III NF-100 In-line Gas Filters Applications

• Ultrapure inert and reactive gas lines
• High-temperature applications
• Dynamic-pressure applications
• New fab construction