Wafergard® MAX HT In-line Gas Filters

Superior particulate filtration for high-temperature, ultrapure gas applications.

• Designed for high-temperature TEOS and high-k applications up to 200°C (392°F) 
• Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters
• The compact size fits many existing delivery systems and provides design flexibility and versatility
• Special baking enables rapid gas delivery startup
• Low differential pressure provides stable and improved material delivery

Wafergard® MAX HT In-line Gas Filters Applications

• Point-of-use filter for CVD tools
• High-temperature applications like TEOS and high-k
• Hot N₂ applications