Wafergard® SG Gas Filters

Wafergard® SG YY series gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. 

• Excellent compatibility with high purity gases, inert gas and CDA applications
• Superior downstream cleanliness

Wafergard® SG Gas Filters Applications

• Photovoltaic process gases
• Display manufacturing process gases
• Gas cabinets
• Valve manifold boxes
• Gas panels