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Meeting every requirement for manufacturing and quality control.
GateKeeper® Z2 Series Gas Purification Systems
Delivers purified extreme clean dry air (XCDA®) purge gas to today's scanner platforms, including immersion lithography tools.
- Z2 series systems remove contaminants from CDA (air) gas
- Ensures cleaner process in parts-per-trillion levels
- Power failures will not harm the system
- Purifiers automatically self-regenerate
- Uses minimal fab floor space to save costs
GateKeeper® Z2 Series Gas Purification Systems Applications
- For use with CDA (air) gas
- For removal of SO2, SOX, NOX, H2S, H2O, CO2 and more
- For a continuous flow of pure gas
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