The GateKeeper® Gas Purification System (GPS) Z3 series is the latest continuous service gas purifications system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution to purify purge gases used in a dry and immersion-based lithography tools.

• Purifies to ppt (parts-per-trillion) levels
• Low pressure drop resulting in no changes to inlet pressure required
• Self-regenerating purifiers
• Low cost of ownership
• Ambient temperature purification
• Power failure will not damage purification system

GateKeeper^® Z3 Series Gas Purification Systems Applications

• Photolithography
• FOUP Cleaning and purging
• Stocker cleaning and purging
• Other applications requiring XCDA purge gas