Point-of-tool, DI water filter with strong contaminant and metal ion retention and good flow-rate performance in greater than 180 nm technology nodes.

Fluorogard® FP/FP-HP Filter Applications

• Industry: Semiconductor, Data Storage, Flat Panel Display, Bulk Chemical, LED
• Process: Wet Etch and Clean, Bulk Chemical, Substrate Cleaning, Magnetic Head - Wet Etch and Clean, CDA, Organic layer printing, Bulk Gas Delivery
• Chemistry: Solvents, Aqueous Acids, Bases, Detergents, DI Water
• Installation Point: Point of Tool, Bulk, Facilities