Clean, all-purpose bulk chemical filter with strong retention and flow rate performance in 65 – 180 nm technology nodes.

Fluorogard® PE Filters Applications

• Industry: Semiconductor (Bulk Chemical), Data Storage (Substrate,  Media - IPA, Media - Lube)
• Chemistry: Photoresist, Photochemicals, Solvents, non-oxidizing chemicals 
• Installation Point: Point of Tool, Facilities, Bulk