GateKeeper® DZ Series Gas Purification Systems
The GateKeeper® Gas Purification System (GPS) DZ series is the latest continuous service gas purifications system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution. It delivers purified CO2 gas to today’s scanner platforms, including immersion lithography tools. The ultra-small footprint and compact design requires minimal fab floor space and allows easy access to serviceable components.
• Purifies to ppt (parts-per-trillion) levels
• Low pressure drop resulting in no changes to inlet pressure required
• Self-regenerating purifiers
• Low cost of ownership
• Ambient temperature purification
• Power failure will not damage purification system
• CE, CSEI (China) and SEMI® certified
GateKeeper® DZ Series Gas Purification Systems Applications
• Photolithography
• Wet etch and clean
• Applications that require purified CO2 gas
