GateKeeper® GPU Gas Purifiers

GateKeeper^® GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity.

• Purity to ppt levels
• Wide range of gas compatibility, including corrosive gases such as Cl₂, HBr, HCl, CF₄, SO₂, SF₆
• Low pressure drop across the purifier
• CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
• Regenerable – eliminates disposal issues and costs
• Long lifetime – improved cost of ownership
• Use ambient temperature purification 

GateKeeper^® GPU Gas Purifiers Applications

• Bulk gas delivery
• Photolithography
• Epitaxy
• Dry etch
• Wafer growing
• Deposition