Delivers purified extreme clean dry air (XCDA^®) purge gas to today's scanner platforms, including immersion lithography tools. 

• Z2 series systems remove contaminants from CDA (air) gas
• Ensures cleaner process in parts-per-trillion levels
• Power failures will not harm the system
• Purifiers automatically self-regenerate
• Uses minimal fab floor space to save costs 

GateKeeper^® Z2 Series Gas Purification Systems Applications

• For use with CDA (air) gas
• For removal of SO₂, SO_X, NO_X, H₂S, H₂O, CO₂ and more
• For a continuous flow of pure gas