Our advanced gas purification technology efficiently reduces solid and volatile metals such as chromium (Cr) and manganese (Mn) from ozone gas.

• Advanced gas purification technology enables a >99% volatile efficiency removal rating for Cr, significantly reducing the conditioning time required for the ozone gas delivery system
• Integrated PTFE/PFA filter removes particles immediately after media purification, reducing wafer particles and eliminating the need for an independent filter
• Compact, in-line design with gasket seal enables fast, easy installation

GateKeeper® GPU Ozone Gas Purifiers Applications

• Chemical vapor deposition (CVD) tools
• Dry etching/ashing tools
• Wet etch and clean (WEC) tools