MegaTorr® PS21 Ammonia Gas Purifiers

These PS21 automatically regenerable, bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

• Uses adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications
• Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process
• Adsorber regeneration is accomplished by back flushing with a mixture of purified nitrogen (N₂) and low concentration hydrogen (H₂) at an elevated temperature, then the regenerated vessel is reconditioned with ammonium (NH₃) prior to placing it back into service
• Optimized design provides sub-ppb performance in small footprints with flow rates up to 1,667 slpm (100 Nm³/hr)