MegaTorr® PS22 XCDA® Gas Purifiers
These PS22 automatically regenerable, bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.
- Uses ambient temperature adsorption processes designed specifically to provide ultra-high purity extreme clean dry air (XCDA®) for semiconductor applications
- Optimized design provides sub-ppb performance in small footprints with flow rates up to 250,000 slpm (15,000 Nm3/hr)
- Outlet impurity levels for water (H2O) and trace impurities including TOC's (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids, and NOx are reduced to below ppb levels
- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
Specifications
Dimensions
| Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
| PS22-MGT10 - PS22-MGT30 | 138 | 80 | 40 | <110 |
| PS22-MGT40 - PS22-MGT60 | 168 | 87 | 61 | <180 |
| PS22-MGT90 - PS22-MGT120 | 165 | 100 | 70 | <300 |
| PS22-MGT200 - PS22-MGT300 | 193 | 132 | 135 | <1,500 |
| PS22-MGT400 - PS22-MGT900 | 209 | 148 | 196 | <2,300 |
| PS22-MGT1000 - PS22-MGT1400 | 239 | 191 | 236 | <2,300 |
| PS22-MGT1500 - PS22-MGT3000 | 264 | 252 | 262 | <5,600 |
| PS22-MGT4000 - PS22-MGT5000 | 264 | 252 | 262 | <6,000 |
| PS22-MGT16000 - PS22-MGT10000 | 267 | 252 | 467 | <10,500 |
| <PS22-MGT10000 | Models available. Contact Entegris for details. | |||
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