MegaTorr® PS31, PS32, PS33 Carbon Dioxide Gas Purifiers

This family of auto regenerable PS31, PS32, and PS33 bulk, carbon dioxide gas purifiers efficiently removes numerous impurities with high reliability, low cost, and high performance.

• Uses an adsorption process designed specifically to provide ultra-high purity gas for semiconductor applications
• Dual adsorber vessels alternate between purify and regeneration modes, providing continuous purification
• Adsorber regeneration is accomplished by back flushing with nitrogen (N₂), hydrogen (H₂), or process gas at elevated temperatures
• The Model PS33 also includes a heated catalyst vessel that converts total hydrocarbons (THC), H₂, and carbon monoxide (CO) into carbon dioxide (CO₂) and water (H₂O)
• Optimized designs provide sub-ppb performance in small footprints with flow rates of 0-8,333 slpm (500 Nm³/hr)
• Available in PS31, PS32, and PS33 configurations to remove specific gases for your application

MegaTorr^® PS31, PS32, PS33 Carbon Dioxide Gas Purifiers Applications

• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar