MegaTorr® PS31, PS32, PS33 Carbon Dioxide Gas Purifiers

#entegris #Gas Purification Systems

This family of auto regenerable PS31, PS32, and PS33 bulk, carbon dioxide gas purifiers efficiently removes numerous impurities with high reliability, low cost, and high performance.

  • Uses an adsorption process designed specifically to provide ultra-high purity gas for semiconductor applications
  • Dual adsorber vessels alternate between purify and regeneration modes, providing continuous purification
  • Adsorber regeneration is accomplished by back flushing with nitrogen (N2), hydrogen (H2), or process gas at elevated temperatures
  • The Model PS33 also includes a heated catalyst vessel that converts total hydrocarbons (THC), H2, and carbon monoxide (CO) into carbon dioxide (CO2) and water (H2O)
  • Optimized designs provide sub-ppb performance in small footprints with flow rates of 0-8,333 slpm (500 Nm3/hr)
  • Available in PS31, PS32, and PS33 configurations to remove specific gases for your application

MegaTorr® PS31, PS32, PS33 Carbon Dioxide Gas Purifiers Applications

  • Semiconductor
  • Data storage
  • Flat panel display
  • LED
  • Solar
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