MegaTorr® PS5 Rare Gas Purifiers

#entegris #Gas Filter

These PS5 helium/argon bulk rare gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

  • Patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds
  • Designed to last multiple years; once a column is consumed it can be replaced with a new column, for a new lifetime
  • Downstream of the heated getter columns, hydrogen (H2) impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU)
  • Comes standard with GettSafe™ fast response thermal protection, which quickly detects excessive heat in the getter column and takes action to isolate the purifier
  • Optimized design provides sub-ppb performance in small footprints with one meter front/rear access and flow rates up to 5,833 slpm (350 Nm3/hr)
MegaTorr® PS5 Rare Gas Purifiers Applications
  • Semiconductor
  • Data storage
  • Flat panel display
  • LED
  • Solar

Specifications

Dimensions

ModelH (cm)W (cm)D (cm)Weight (kg)
PS5-MGT151856189<204
PS5-MGT301856189<204
PS5-MGT501856189<240
PS5-MGT10018512089<500 
PS5-MGT15018518089<750
PS5-MGT20018524289<1,000
PS5-MGT350193193127<1,250
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     0-2121-7226

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Ms. Adisa

  096-782-6363  

  adisa@filterfineth.com

    Metrology Division

Mr. Chayanon

  096-782-4449  

  chayanon@filterfineth.com

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