MegaTorr® PS7-H Hydrogen Gas Purifiers

These PS7-H bulk gas adsorber and getter beds efficiently remove numerous impurities with high reliability, low cost, and high performance.

• Uses a combination of heated getter and ambient catalytic adsorption processes to provide ultra-high purity hydrogen (H₂) gas for semiconductor applications
• Two ambient temperature adsorber vessels remove water (H₂O), oxygen (O₂), CO, and CO₂, while the downstream getter vessel, operated at an elevated temperature, eliminates nitrogen (N₂) and methane (CH₄)
• Two adsorber vessels alternate between purity and regeneration mode, providing continuous purification
• Adsorber regeneration is accomplished by back flushing with purified hydrogen at elevated temperatures
• Optimized design provides sub-ppb performance in small footprints with flow rates up to 3,333 slpm (200 Nm³/hr)