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MegaTorr® PS8 Nitrogen Gas Purifiers
These PS8 auto regenerable bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.
- Uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications
- Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
- Adsorber regeneration is accomplished by back flushing with a mixture of purified process gas and low concentration hydrogen (H2) at an elevated temperature
- Optimized design provides sub-ppb performance in small footprints with flow rates up to 833,333 slpm (50,000 Nm3/hr)
MegaTorr® PS8 Nitrogen Gas Purifiers Applications
- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
| Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
| PS8-MGS10 - PS8-MGS40 | 138 | 80 | 40 | <110 |
| PS8-MGS50 - PS8-MGS60 | 168 | 87 | 61 | <180 |
| PS8-MGS90 - PS8-MGS120 | 165 | 100 | 70 | <300 |
| PS8-MGT200 - PS8-MGT300 | 193 | 132 | 135 | <1,500 |
| PS8-MGT400 - PS8-MGT600 | 211 | 148 | 196 | <2,300 |
| PS8-MGT700 - PS8-MGT1000 | 209 | 191 | 236 | <2,300 |
| PS8-MGT1200 - PS8-MGT3000 | 265 | 252 | 262 | <5,500 |
| PS8-MGT4000 - PS8-MGT10000 | 267 | 252 | 467 | <25,500 |
| > PS8-MGT10000 | Models available. Contact Entegris for details. | |||
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