High-flow cartridge filters are designed for point-of-tool process fluid filtration in microelectronics industry applications, and flat panel display manufacturing.

• High flow and efficient particle removal ensure rapid particle removal in one-pass and recirculating applications
• We offer PTFE, PTFE Plus, PES, and PP membranes and a variety of retention ratings to meet specific application needs
• PTFE and PTFE Plus membranes are designed for stripper, solvent, acidic, and alkaline chemicals and DI water applications
• Hydrophilic PES membrane eliminates the need for prewetting and flushing, saving time
• PP membrane filter is well suited for larger format flat panel display manufacturing

Panelgard™ 334 Filter Applications

• Stripper, IPA, or solvent applications
• Wet etch chemical applications
• Larger format flat panel displays