Point-of-use, solvent, DI water, and dilute acid/base filters with high flow rate and good contaminant retention performance in microelectronic cleaning applications.

• PES cartridge and disposable filters are high-flow, longer lifetime filters ideally suited for weak acid,  base, and ultrapure DI water filtration
• PP cartridge and disposable filters are ideally suited for acid, base, process water, solvent, dye, and lacquer filtration in flat panel display and chemical manufacturing
• PS high-retention filters for final cleaning and ultrapure DI water processes
• Various retention ratings, fittings sizes, and types to meet various requirements

ProcessGard® PES/PP/PS Filters Applications

• Industry: Data Storage (Facilities, HDD Assembly - Cleaning, HGA/HSA Assembly - Cleaning, Cleaning)
• Chemical: Dilute Acids, Dilute Bases, Resist Stripper, Solvent, DI Water
• Installation Point: Point-of-Tool, Point-of-Dispense