Unmatched durability and cleanliness in point-of-tool and dispense applications involving solvents, DI water, and dilute acids and bases.

• PTFE pleated membrane offers excellent chemical compatibility for use in a wide variety of chemicals and reliable filtration of defect-causing particles
• Hydrophobic and hydrophilic membrane options allow use without pre-wetting, reducing start-up time and lowering operation costs
• Available in 4" to 40" Ø70 mm cartridges and 10" Ø83 mm cartridge formats to suit various flow requirements in point-of-tool or bulk filtration applications

ProcessGard® PTFE Plus Filters Applications

• The hydrophilic format is for use in DI water and water-based acid/alkaline solutions for developer, etching, and cleaning applications
• The hydrophobic format is for use in air filtration, stripper, and IPA or solvent applications in flat panel display or hard disk industries