Advanced filtration of aqueous, outgassing, and aggressive acid and base chemistries in 28 nm or greater technology nodes. 

Enables high flow rate and retention performance. 

Brand Name

• QuickChange

Chemistry

• Aggressive Acids
• Aggressive Bases
• Solvent

Feature Size (Layer)

• 28-90 nm
• >90 nm

Installation Point

• Point of Tool
• Point of Dispense
• Bulk

QuickChange® NX Filter Applications

• Industry: Semiconductor, Flat Panel Display, Data Storage, LED
• Process: Wet Etch and Clean, Magnetic Head - Wet Etch and Clean, Bulk Chemical Delivery
• Chemistry: Aggressive Acids, Aggressive Bases, Solvents
• Installation Point: Point of Tool, Point of Dispense, Bulk