Cost effective filtration for non-outgassing chemistries and solvents at moderate temperatures in applications where metal control is not critical.

Savana® AT Filter Applications

• Aggressive acid and base, point-of-tool filtration
• Bulk chemical delivery and wet etch and clean semiconductor applications
• Purification life sciences applications
• Bulk chemical flat panel display applications
• Substrate - Ni-P plating and magnetic head - wet etch and clean data storage applications
• LED applications